Ion induced modifications of Mn-doped ZnO films
We have studied ion impact effects on atomic structure in terms of X-ray diffraction (XRD), optical absorption and electrical resistivity of Mn(6%)-doped ZnO films under 100MeV Xe ion impact at room temperature. We find the monotonic reduction of the XRD intensity to 1/50 of that of unirradiated fil...
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Veröffentlicht in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2015-12, Vol.365, p.191-195 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We have studied ion impact effects on atomic structure in terms of X-ray diffraction (XRD), optical absorption and electrical resistivity of Mn(6%)-doped ZnO films under 100MeV Xe ion impact at room temperature. We find the monotonic reduction of the XRD intensity to 1/50 of that of unirradiated film at 5×1014cm−2 and the lattice compaction of 0.6% for the ion fluence >1013cm−2, little bandgap change ( |
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ISSN: | 0168-583X 1872-9584 |
DOI: | 10.1016/j.nimb.2015.08.010 |