Atmospheric pressure plasmas for surface modification of flexible and printed electronic devices: A review

Recently, non-equilibrium atmospheric pressure plasma, especially those operated at low gas temperatures, have become a topic of great interest for the processing of flexible and printed electronic devices due to several benefits such as the reduction of process and reactor costs, the employment of...

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Veröffentlicht in:Thin solid films 2016-01, Vol.598, p.315-334
Hauptverfasser: Kim, Kyong Nam, Lee, Seung Min, Mishra, Anurag, Yeom, Geun Young
Format: Artikel
Sprache:eng
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Zusammenfassung:Recently, non-equilibrium atmospheric pressure plasma, especially those operated at low gas temperatures, have become a topic of great interest for the processing of flexible and printed electronic devices due to several benefits such as the reduction of process and reactor costs, the employment of easy-to-handle apparatuses and the easier integration into continuous production lines. In this review, several types of typical atmospheric pressure plasma sources have been addressed, and the processes including surface treatment, texturing and sintering for application to flexible and printed electronic devices have been discussed.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2015.05.035