Optimized design and fabrication of nanosecond response electro-optic switch based on ultraviolet-curable polymers

A nanosecond response waveguide electro-optic (EO) switch based on ultraviolet (UV) sensitive polymers of Norland optical adhesive (NOA73) and Dispersed Red 1 (DR1) doped SU-8 (DR1/SU-8) is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film...

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Veröffentlicht in:Chinese physics B 2015-04, Vol.24 (4), p.184-192
1. Verfasser: 赵旭亮 岳远斌 刘通 孙健 王希斌 孙小强 陈长鸣 张大明
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Sprache:eng
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Zusammenfassung:A nanosecond response waveguide electro-optic (EO) switch based on ultraviolet (UV) sensitive polymers of Norland optical adhesive (NOA73) and Dispersed Red 1 (DR1) doped SU-8 (DR1/SU-8) is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib wave- guide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch.
ISSN:1674-1056
2058-3834
1741-4199
DOI:10.1088/1674-1056/24/4/044101