F- and Cl-terminations of (100)-oriented single crystalline diamond

F- and Cl-terminations of (100)-oriented single crystalline diamond

The surface termination of single crystalline diamond with fluorine and chlorine was investigated. The diamond was exposed to SF6 inductively coupled plasma for fluorination and to Cl2 plasma for chlorination. For the fluorine termination, the plasma treatment caused one monolayer of fluorine (measu...

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Veröffentlicht in:Physica status solidi. A, Applications and materials science Applications and materials science, 2014-10, Vol.211 (10), p.2328-2332
Hauptverfasser: Widmann, C. J., Giese, C., Wolfer, M., Kono, S., Nebel, C. E.
Format: Artikel
Sprache:eng
Schlagworte:
Chlorination
Chlorine
chlorine-termination
Crystal structure
diamond
Diamonds
Fluorides
Fluorine
fluorine-termination
Inductively coupled plasma
Monolayers
Plasma
Roughening
surface termination
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Zusammenfassung:The surface termination of single crystalline diamond with fluorine and chlorine was investigated. The diamond was exposed to SF6 inductively coupled plasma for fluorination and to Cl2 plasma for chlorination. For the fluorine termination, the plasma treatment caused one monolayer of fluorine (measured with two angle photoelectron detection) and no carbonyl fluorides on the diamond surface. Furthermore no graphitization or roughening of the surface was observed. The plasma treatment with chlorine led to rough surfaces.
ISSN:1862-6300
1862-6319
DOI:10.1002/pssa.201431188