Structural and Transport Properties of Dust Formation in Plasma of Noble Gases Mixture in Radio Frequency Discharge
In the present paper properties of dust formation in RF discharges of pure helium and helium‐argon mixture are investigated. Analysis of macroscopic properties of dust formation at different pressures of background gas reveals a change of properties of dust formation in the mixture of gases in compa...
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Veröffentlicht in: | Contributions to plasma physics (1988) 2013-05, Vol.53 (4-5), p.426-431 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | In the present paper properties of dust formation in RF discharges of pure helium and helium‐argon mixture are investigated. Analysis of macroscopic properties of dust formation at different pressures of background gas reveals a change of properties of dust formation in the mixture of gases in comparison with discharge in pure helium. As possible mechanisms for observed behavior, a change of ion jet content and a friction of neutral component are considered. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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ISSN: | 0863-1042 1521-3986 |
DOI: | 10.1002/ctpp.201200122 |