Fin width and height dependence of bipolar amplification in bulk FinFETs submitted to heavy ion irradiation

FinFET technologies are becoming the mainstream process as technology scales down. Based on a 28-nm bulk p- FinFET device, we have investigated the fin width and height dependence of bipolar amplification for heavy-ion-irradiated FinFETs by 3D TCAD numerical simulation. Simulation results show that...

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Veröffentlicht in:Chinese physics B 2015-11, Vol.24 (11), p.650-655
1. Verfasser: 于俊庭 陈书明 陈建军 黄鹏程
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Sprache:eng
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Zusammenfassung:FinFET technologies are becoming the mainstream process as technology scales down. Based on a 28-nm bulk p- FinFET device, we have investigated the fin width and height dependence of bipolar amplification for heavy-ion-irradiated FinFETs by 3D TCAD numerical simulation. Simulation results show that due to a well bipolar conduction mechanism rather than a channel (fin) conduction path, the transistors with narrower fins exhibit a diminished bipolar amplification effect, while the fin height presents a trivial effect on the bipolar amplification and charge collection. The results also indicate that the single event transient (SET) pulse width can be mitigated about 35% at least by optimizing the ratio of fin width and height, which can provide guidance for radiation-hardened applications in bulk FinFET technology.
ISSN:1674-1056
2058-3834
1741-4199
DOI:10.1088/1674-1056/24/11/119401