Role of surface morphology on desorption kinetics of water molecules from uncoated silicon microcantilever

Role of surface morphology on desorption kinetics of water molecules from uncoated silicon microcantilever

Desorption kinetics of water molecules from uncoated silicon microcantilevers (MC) is studied, by measuring resonance frequency, with Relative Humidity (RH) varying in the range of 50–15%. Shift in resonance frequency of MC was used to estimate the desorbed mass, which over-estimated the number of m...

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Veröffentlicht in:Sensors and actuators. B, Chemical Chemical, 2016-02, Vol.223, p.35-39
Hauptverfasser: Raghuramaiah, M., Prabakar, K., Tripura Sundari, S., Jayapandian, J.
Format: Artikel
Sprache:eng
Schlagworte:
Desorption
Kinetic studies
Mathematical models
Morphology
Nanostructure
Relative humidity
Silicon
Surface morphology
Three dimensional
Uncoated microcantilever
Water chemistry
Water molecules
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Zusammenfassung:Desorption kinetics of water molecules from uncoated silicon microcantilevers (MC) is studied, by measuring resonance frequency, with Relative Humidity (RH) varying in the range of 50–15%. Shift in resonance frequency of MC was used to estimate the desorbed mass, which over-estimated the number of monolayers desorbed between the RH values of interest and followed a single exponential decay model. Moreover, desorption rate is found to be higher for RH>25% compared to RH
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2015.09.018