The Effect of Focusing on the Lateral Resolution of an Interference Microscope

The Effect of Focusing on the Lateral Resolution of an Interference Microscope

The dependence of the lateral resolution of an interference microscope on the distance between the phase step and the focal plane of the objective of the microscope object channel is analyzed. The results of measurements at several wavelengths, obtained by numerical modeling over a wide range of hei...

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Veröffentlicht in:Measurement techniques 2014-04, Vol.57 (1), p.69-73
Hauptverfasser: Levin, G. G., Moiseev, N. N., Ilyushin, Ya. A., Minaev, V. L.
Format: Artikel
Sprache:eng
Schlagworte:
Analysis
Analytical Chemistry
Channels
Characterization and Evaluation of Materials
Focal plane
Interference
Mathematical models
Measurement Science and Instrumentation
Measurement techniques
Microscopes
Nuclear radiation
Physical Chemistry
Physics
Physics and Astronomy
Radiation
Studies
Wavelengths
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Beschreibung
Zusammenfassung:The dependence of the lateral resolution of an interference microscope on the distance between the phase step and the focal plane of the objective of the microscope object channel is analyzed. The results of measurements at several wavelengths, obtained by numerical modeling over a wide range of heights of the phase step and by processing actual phase images, are compared.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-014-0408-1