Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters Correspondence
The first MgZr co-doped AlN-based vibrational energy harvester (VEH) is presented. (MgZr)AlN, which is a new class of doped AlN, provides high piezoelectricity and cost advantage. Using 13%-(MgZr)-doped AlN for micromachined VEHs, maximum output power of 1.3 mu W was achieved with a Q-factor of 400...
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| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2015-11, Vol.62 (11), p.2005-2008 |
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| container_end_page | 2008 |
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| container_issue | 11 |
| container_start_page | 2005 |
| container_title | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| container_volume | 62 |
| creator | Minh, Le Van Hara, Motoaki Yokoyama, Tsuyoshi Nishihara, Tokihiro Ueda, Masanori Kuwano, Hiroki |
| description | The first MgZr co-doped AlN-based vibrational energy harvester (VEH) is presented. (MgZr)AlN, which is a new class of doped AlN, provides high piezoelectricity and cost advantage. Using 13%-(MgZr)-doped AlN for micromachined VEHs, maximum output power of 1.3 mu W was achieved with a Q-factor of 400 when resonant frequency, vibration acceleration, load resistance were 792 Hz, 8 m/s super(2), and 1.1 M Omega , respectively. Normalized power density was 8.1 kW.g super(-2).m super(-3). This was one of the highest values among the currently available piezoelectric VEHs. |
| doi_str_mv | 10.1109/TUFFC.2014.006750 |
| format | Article |
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(MgZr)AlN, which is a new class of doped AlN, provides high piezoelectricity and cost advantage. Using 13%-(MgZr)-doped AlN for micromachined VEHs, maximum output power of 1.3 mu W was achieved with a Q-factor of 400 when resonant frequency, vibration acceleration, load resistance were 792 Hz, 8 m/s super(2), and 1.1 M Omega , respectively. Normalized power density was 8.1 kW.g super(-2).m super(-3). 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(MgZr)AlN, which is a new class of doped AlN, provides high piezoelectricity and cost advantage. Using 13%-(MgZr)-doped AlN for micromachined VEHs, maximum output power of 1.3 mu W was achieved with a Q-factor of 400 when resonant frequency, vibration acceleration, load resistance were 792 Hz, 8 m/s super(2), and 1.1 M Omega , respectively. Normalized power density was 8.1 kW.g super(-2).m super(-3). This was one of the highest values among the currently available piezoelectric VEHs.</abstract><doi>10.1109/TUFFC.2014.006750</doi></addata></record> |
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| source | IEEE Electronic Library (IEL) |
| subjects | Aluminum Aluminum nitride Density Energy harvesting Micromachining Micromechanics Piezoelectricity Vibration |
| title | Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters Correspondence |
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