Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters Correspondence

Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters Correspondence

The first MgZr co-doped AlN-based vibrational energy harvester (VEH) is presented. (MgZr)AlN, which is a new class of doped AlN, provides high piezoelectricity and cost advantage. Using 13%-(MgZr)-doped AlN for micromachined VEHs, maximum output power of 1.3 mu W was achieved with a Q-factor of 400...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2015-11, Vol.62 (11), p.2005-2008
Hauptverfasser: Minh, Le Van, Hara, Motoaki, Yokoyama, Tsuyoshi, Nishihara, Tokihiro, Ueda, Masanori, Kuwano, Hiroki
Format: Artikel
Sprache:eng
Schlagworte:
Aluminum
Aluminum nitride
Density
Energy harvesting
Micromachining
Micromechanics
Piezoelectricity
Vibration
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The first MgZr co-doped AlN-based vibrational energy harvester (VEH) is presented. (MgZr)AlN, which is a new class of doped AlN, provides high piezoelectricity and cost advantage. Using 13%-(MgZr)-doped AlN for micromachined VEHs, maximum output power of 1.3 mu W was achieved with a Q-factor of 400 when resonant frequency, vibration acceleration, load resistance were 792 Hz, 8 m/s super(2), and 1.1 M Omega , respectively. Normalized power density was 8.1 kW.g super(-2).m super(-3). This was one of the highest values among the currently available piezoelectric VEHs.
ISSN:0885-3010
DOI:10.1109/TUFFC.2014.006750