Nanotextured and polytetrafluoroethylene-coated superhydrophobic surface

We produced a superhydrophobic surface by reactive ion etching and polytetrafluoroethylene coating of a silicon substrate. SF6/O2 and a metal mesh were used for the etching, which produced pyramidal nanostructures on the substrate. The sputtering of the polytetrafluoroethylene thin film over the nan...

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Veröffentlicht in:Thin solid films 2013-11, Vol.547, p.111-115
Hauptverfasser: Lee, Dongin, Seo, Sung-Bo, Kim, Dong-Young, Kim, Hwa-Min, Cho, Chanseob, Lee, Jonghyun, Lim, Sooyeon, Kim, Jinseok, Lee, Byeungleul, Kim, Bonghwan
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Sprache:eng
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Zusammenfassung:We produced a superhydrophobic surface by reactive ion etching and polytetrafluoroethylene coating of a silicon substrate. SF6/O2 and a metal mesh were used for the etching, which produced pyramidal nanostructures on the substrate. The sputtering of the polytetrafluoroethylene thin film over the nanotextured substrate created a superhydrophobic surface with a water contact angle greater than 150°, which was maintained for 7weeks. The fluorinated polymer also exhibited hydrophobicity properties. •We developed a process for producing a superhydrophobic surface.•The nanotextured surface was coated with polytetrafluoroethylene.•The water contact angle of the surface was 150° and maintained for 7weeks.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2013.04.059