Motivation of concepts for the negative ion extraction from a single element of the matrix source

A single element of a matrix source of negative hydrogen ions (a planar-coil inductively driven small-radius discharge equipped with an extraction system) is studied regarding the ion extraction. Since the spatial distribution of the negative ions obeys that of the dc potential, the latter is contro...

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Veröffentlicht in:Review of scientific instruments 2016-02, Vol.87 (2), p.02B115-02B115
Hauptverfasser: Lishev, St, Shivarova, A, Yordanov, D
Format: Artikel
Sprache:eng
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Zusammenfassung:A single element of a matrix source of negative hydrogen ions (a planar-coil inductively driven small-radius discharge equipped with an extraction system) is studied regarding the ion extraction. Since the spatial distribution of the negative ions obeys that of the dc potential, the latter is controlled by applying a high bias to the plasma electrode of the extraction system. This leads to discharge maintenance by both rf and dc power deposition and, respectively, to similarities with the axial profile of the dc potential in the glow discharges. The discharge length, the applied rf power, and the bias to the plasma electrode and its radius are the parameters varied in determination of proper conditions for the ion extraction.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4932986