3D self-consistent modeling of a matrix source of negative hydrogen ions

The paper is in the scope of studies on the rf driving of a matrix source of negative hydrogen ions: a matrix of small radius discharges with planar-coil inductive driving and single aperture extraction from each discharge. The results from a three-dimensional model, in which plasma description is c...

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Veröffentlicht in:Review of scientific instruments 2016-02, Vol.87 (2), p.02B123-02B123
Hauptverfasser: Tarnev, Kh, Demerdjiev, A, Shivarova, A, Lishev, St
Format: Artikel
Sprache:eng
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Zusammenfassung:The paper is in the scope of studies on the rf driving of a matrix source of negative hydrogen ions: a matrix of small radius discharges with planar-coil inductive driving and single aperture extraction from each discharge. The results from a three-dimensional model, in which plasma description is coupled to electrodynamics, confirm former conclusion that a single coil driving of the whole matrix by a zigzag coil with an omega-shaped conductor on the bottom of each discharge tube ensures efficient rf power deposition to the plasma. The latter is due to similarities with the rf driving of a single discharge by a single planar coil, shown by the obtained induced current and spatial distribution of the plasma parameters. Distinctions associated with the coil configuration as a single coil for the whole matrix are also discussed.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4934636