Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process
In this paper, a kind of novel open-loop two-stage torsion-mirror optical actuators has been demonstrated. The mirrors are fabricated in SOI wafers, and exhibit good basic electromechanical characteristics. They provide an impetus to being brought into use as optical switches or attenuators, etc. fo...
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| Veröffentlicht in: | Applied Mechanics and Materials 2014-06, Vol.529 (Mechanical Automation and Materials Engineering II), p.169-172 |
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| container_end_page | 172 |
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| container_issue | Mechanical Automation and Materials Engineering II |
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| container_title | Applied Mechanics and Materials |
| container_volume | 529 |
| creator | Wu, Wen Gang Chen, Qing Hua Chen, Ying Jun Li, Yan Mei |
| description | In this paper, a kind of novel open-loop two-stage torsion-mirror optical actuators has been demonstrated. The mirrors are fabricated in SOI wafers, and exhibit good basic electromechanical characteristics. They provide an impetus to being brought into use as optical switches or attenuators, etc. for fiber communication applications. |
| doi_str_mv | 10.4028/www.scientific.net/AMM.529.169 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1762095280</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1762095280</sourcerecordid><originalsourceid>FETCH-LOGICAL-c2439-1e886cb30f43e8baa23c8862dea70799a585ba38f0abd987da16f3971e3656f03</originalsourceid><addsrcrecordid>eNqNkV1LwzAUhoMf4Nf-Q0EQb9rlo02TG1GHU2Flitt1SNPURbakJh3Df2_mBMUrrw7nnIf3HHgAuEAwyyFmw81mkwVltO1Na1RmdT-8qaqswDxDlO-BY0QpTsuc4X0w4CUjkDBSQJ6jg68dTDkh9AichPAGIc1Rzo7B81jW3ijZG2cT1yb9QifTTtt04lyXVHfVS3org26SmVn2xr4mlfHe-WQets2WHrlV59a2SZ68UzqEM3DYymXQg-96Cubju9noIZ1M7x9HN5NU4ZzwFGnGqKoJbHOiWS0lJipOcKNlCUvOZcGKWhLWQlk3nJWNRLQlvESa0IK2kJyCy11u5937WoderExQermUVrt1EKikGPICsy16_gd9c2tv43eRQhxBXBY4Ulc7SnkXgtet6LxZSf8hEBRbAyIaED8GRDQgogERDYhoIAZc7wJ6L23otVr8uvO_iE8P-5O6</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1719102752</pqid></control><display><type>article</type><title>Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process</title><source>Scientific.net Journals</source><creator>Wu, Wen Gang ; Chen, Qing Hua ; Chen, Ying Jun ; Li, Yan Mei</creator><creatorcontrib>Wu, Wen Gang ; Chen, Qing Hua ; Chen, Ying Jun ; Li, Yan Mei</creatorcontrib><description>In this paper, a kind of novel open-loop two-stage torsion-mirror optical actuators has been demonstrated. The mirrors are fabricated in SOI wafers, and exhibit good basic electromechanical characteristics. They provide an impetus to being brought into use as optical switches or attenuators, etc. for fiber communication applications.</description><identifier>ISSN: 1660-9336</identifier><identifier>ISSN: 1662-7482</identifier><identifier>ISBN: 9783038350941</identifier><identifier>ISBN: 303835094X</identifier><identifier>EISSN: 1662-7482</identifier><identifier>DOI: 10.4028/www.scientific.net/AMM.529.169</identifier><language>eng</language><publisher>Zurich: Trans Tech Publications Ltd</publisher><subject>Actuators ; Attenuators ; Optical fibers ; Optical switching ; Wafers</subject><ispartof>Applied Mechanics and Materials, 2014-06, Vol.529 (Mechanical Automation and Materials Engineering II), p.169-172</ispartof><rights>2014 Trans Tech Publications Ltd</rights><rights>Copyright Trans Tech Publications Ltd. Jun 2014</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c2439-1e886cb30f43e8baa23c8862dea70799a585ba38f0abd987da16f3971e3656f03</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttps://www.scientific.net/Image/TitleCover/3172?width=600</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Wu, Wen Gang</creatorcontrib><creatorcontrib>Chen, Qing Hua</creatorcontrib><creatorcontrib>Chen, Ying Jun</creatorcontrib><creatorcontrib>Li, Yan Mei</creatorcontrib><title>Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process</title><title>Applied Mechanics and Materials</title><description>In this paper, a kind of novel open-loop two-stage torsion-mirror optical actuators has been demonstrated. The mirrors are fabricated in SOI wafers, and exhibit good basic electromechanical characteristics. They provide an impetus to being brought into use as optical switches or attenuators, etc. for fiber communication applications.</description><subject>Actuators</subject><subject>Attenuators</subject><subject>Optical fibers</subject><subject>Optical switching</subject><subject>Wafers</subject><issn>1660-9336</issn><issn>1662-7482</issn><issn>1662-7482</issn><isbn>9783038350941</isbn><isbn>303835094X</isbn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><sourceid>BENPR</sourceid><recordid>eNqNkV1LwzAUhoMf4Nf-Q0EQb9rlo02TG1GHU2Flitt1SNPURbakJh3Df2_mBMUrrw7nnIf3HHgAuEAwyyFmw81mkwVltO1Na1RmdT-8qaqswDxDlO-BY0QpTsuc4X0w4CUjkDBSQJ6jg68dTDkh9AichPAGIc1Rzo7B81jW3ijZG2cT1yb9QifTTtt04lyXVHfVS3org26SmVn2xr4mlfHe-WQets2WHrlV59a2SZ68UzqEM3DYymXQg-96Cubju9noIZ1M7x9HN5NU4ZzwFGnGqKoJbHOiWS0lJipOcKNlCUvOZcGKWhLWQlk3nJWNRLQlvESa0IK2kJyCy11u5937WoderExQermUVrt1EKikGPICsy16_gd9c2tv43eRQhxBXBY4Ulc7SnkXgtet6LxZSf8hEBRbAyIaED8GRDQgogERDYhoIAZc7wJ6L23otVr8uvO_iE8P-5O6</recordid><startdate>20140601</startdate><enddate>20140601</enddate><creator>Wu, Wen Gang</creator><creator>Chen, Qing Hua</creator><creator>Chen, Ying Jun</creator><creator>Li, Yan Mei</creator><general>Trans Tech Publications Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7TB</scope><scope>8BQ</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>BENPR</scope><scope>BFMQW</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>FR3</scope><scope>HCIFZ</scope><scope>JG9</scope><scope>KB.</scope><scope>KR7</scope><scope>L6V</scope><scope>M7S</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope></search><sort><creationdate>20140601</creationdate><title>Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process</title><author>Wu, Wen Gang ; Chen, Qing Hua ; Chen, Ying Jun ; Li, Yan Mei</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c2439-1e886cb30f43e8baa23c8862dea70799a585ba38f0abd987da16f3971e3656f03</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Actuators</topic><topic>Attenuators</topic><topic>Optical fibers</topic><topic>Optical switching</topic><topic>Wafers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wu, Wen Gang</creatorcontrib><creatorcontrib>Chen, Qing Hua</creatorcontrib><creatorcontrib>Chen, Ying Jun</creatorcontrib><creatorcontrib>Li, Yan Mei</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central</collection><collection>Continental Europe Database</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>Engineering Research Database</collection><collection>SciTech Premium Collection</collection><collection>Materials Research Database</collection><collection>Materials Science Database</collection><collection>Civil Engineering Abstracts</collection><collection>ProQuest Engineering Collection</collection><collection>Engineering Database</collection><collection>Materials Science Collection</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection><jtitle>Applied Mechanics and Materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Wu, Wen Gang</au><au>Chen, Qing Hua</au><au>Chen, Ying Jun</au><au>Li, Yan Mei</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process</atitle><jtitle>Applied Mechanics and Materials</jtitle><date>2014-06-01</date><risdate>2014</risdate><volume>529</volume><issue>Mechanical Automation and Materials Engineering II</issue><spage>169</spage><epage>172</epage><pages>169-172</pages><issn>1660-9336</issn><issn>1662-7482</issn><eissn>1662-7482</eissn><isbn>9783038350941</isbn><isbn>303835094X</isbn><abstract>In this paper, a kind of novel open-loop two-stage torsion-mirror optical actuators has been demonstrated. The mirrors are fabricated in SOI wafers, and exhibit good basic electromechanical characteristics. They provide an impetus to being brought into use as optical switches or attenuators, etc. for fiber communication applications.</abstract><cop>Zurich</cop><pub>Trans Tech Publications Ltd</pub><doi>10.4028/www.scientific.net/AMM.529.169</doi><tpages>4</tpages></addata></record> |
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| identifier | ISSN: 1660-9336 |
| ispartof | Applied Mechanics and Materials, 2014-06, Vol.529 (Mechanical Automation and Materials Engineering II), p.169-172 |
| issn | 1660-9336 1662-7482 1662-7482 |
| language | eng |
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| source | Scientific.net Journals |
| subjects | Actuators Attenuators Optical fibers Optical switching Wafers |
| title | Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-30T13%3A27%3A05IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Fabrication%20of%20the%20Open-Loop%20MEMS-Based%20Tilting%20Mirror%20Using%20the%20Compound%20Process&rft.jtitle=Applied%20Mechanics%20and%20Materials&rft.au=Wu,%20Wen%20Gang&rft.date=2014-06-01&rft.volume=529&rft.issue=Mechanical%20Automation%20and%20Materials%20Engineering%20II&rft.spage=169&rft.epage=172&rft.pages=169-172&rft.issn=1660-9336&rft.eissn=1662-7482&rft.isbn=9783038350941&rft.isbn_list=303835094X&rft_id=info:doi/10.4028/www.scientific.net/AMM.529.169&rft_dat=%3Cproquest_cross%3E1762095280%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1719102752&rft_id=info:pmid/&rfr_iscdi=true |