Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process

Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process

In this paper, a kind of novel open-loop two-stage torsion-mirror optical actuators has been demonstrated. The mirrors are fabricated in SOI wafers, and exhibit good basic electromechanical characteristics. They provide an impetus to being brought into use as optical switches or attenuators, etc. fo...

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Veröffentlicht in:Applied Mechanics and Materials 2014-06, Vol.529 (Mechanical Automation and Materials Engineering II), p.169-172
Hauptverfasser: Wu, Wen Gang, Chen, Qing Hua, Chen, Ying Jun, Li, Yan Mei
Format: Artikel
Sprache:eng
Schlagworte:
Actuators
Attenuators
Optical fibers
Optical switching
Wafers
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Beschreibung
Zusammenfassung:In this paper, a kind of novel open-loop two-stage torsion-mirror optical actuators has been demonstrated. The mirrors are fabricated in SOI wafers, and exhibit good basic electromechanical characteristics. They provide an impetus to being brought into use as optical switches or attenuators, etc. for fiber communication applications.
ISSN:1660-9336
1662-7482
1662-7482
DOI:10.4028/www.scientific.net/AMM.529.169