Recovery of polyalkylene glycol from silicon cutting waste using centrifugation

A great amount of slurry waste is formed during the cutting process from silicon ingot to wafers. More than 50% of this waste comes from cutting liquids. This study investigated centrifugation to recover polyalkylene glycol (PAG) cutting liquid with low turbidity (

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Bibliographische Detailangaben
Veröffentlicht in:	Desalination and water treatment 2015-10, Vol.56 (2), p.443-451
Hauptverfasser:	Tsai, Tzu-Hsuan, Shih, Yu-Pei
Format:	Artikel
Sprache:	eng
Schlagworte:	Centrifugation Cutting Cutting liquid Distilled water Glycols Liquids Machine tools Polyalkylene glycol Recovery Silicon Silicon cutting waste Slurries Stabilization Turbidity Wastes
Online-Zugang:	Volltext
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