Recovery of polyalkylene glycol from silicon cutting waste using centrifugation

Recovery of polyalkylene glycol from silicon cutting waste using centrifugation

A great amount of slurry waste is formed during the cutting process from silicon ingot to wafers. More than 50% of this waste comes from cutting liquids. This study investigated centrifugation to recover polyalkylene glycol (PAG) cutting liquid with low turbidity (

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Bibliographische Detailangaben
Veröffentlicht in:Desalination and water treatment 2015-10, Vol.56 (2), p.443-451
Hauptverfasser: Tsai, Tzu-Hsuan, Shih, Yu-Pei
Format: Artikel
Sprache:eng
Schlagworte:
Centrifugation
Cutting
Cutting liquid
Distilled water
Glycols
Liquids
Machine tools
Polyalkylene glycol
Recovery
Silicon
Silicon cutting waste
Slurries
Stabilization
Turbidity
Wastes
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Beschreibung
Zusammenfassung:A great amount of slurry waste is formed during the cutting process from silicon ingot to wafers. More than 50% of this waste comes from cutting liquids. This study investigated centrifugation to recover polyalkylene glycol (PAG) cutting liquid with low turbidity (
ISSN:1944-3986
1944-3994
1944-3986
DOI:10.1080/19443994.2014.936518