Recovery of polyalkylene glycol from silicon cutting waste using centrifugation
A great amount of slurry waste is formed during the cutting process from silicon ingot to wafers. More than 50% of this waste comes from cutting liquids. This study investigated centrifugation to recover polyalkylene glycol (PAG) cutting liquid with low turbidity (
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| Veröffentlicht in: | Desalination and water treatment 2015-10, Vol.56 (2), p.443-451 |
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| creator | Tsai, Tzu-Hsuan Shih, Yu-Pei |
| description | A great amount of slurry waste is formed during the cutting process from silicon ingot to wafers. More than 50% of this waste comes from cutting liquids. This study investigated centrifugation to recover polyalkylene glycol (PAG) cutting liquid with low turbidity ( |
| doi_str_mv | 10.1080/19443994.2014.936518 |
| format | Article |
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More than 50% of this waste comes from cutting liquids. This study investigated centrifugation to recover polyalkylene glycol (PAG) cutting liquid with low turbidity (<100 NTU). The experimental results show that clean PAG liquids could be obtained by using water as a diluent. Because water with high chemical polarity and strong hydrogen bonding would destroy the adsorption of PAG molecules on particles, and weaken the steric stabilization, the particles are aggregated and then separated from liquids by centrifugation. After 50 wt.% water-assisted centrifugation at 3,253 G-force for 24 h, the solid content of the upper liquid decreased to 0.018 g/L, and the turbidity reduced to 7.2 nephelometric turbidity units (NTU). The obtained liquid was then vacuum distillated to remove water. The final recovered PAG with only 0.43 NTU could be reused in the cutting process.</description><identifier>ISSN: 1944-3986</identifier><identifier>ISSN: 1944-3994</identifier><identifier>EISSN: 1944-3986</identifier><identifier>DOI: 10.1080/19443994.2014.936518</identifier><language>eng</language><publisher>Abingdon: Elsevier Inc</publisher><subject>Centrifugation ; Cutting ; Cutting liquid ; Distilled water ; Glycols ; Liquids ; Machine tools ; Polyalkylene glycol ; Recovery ; Silicon ; Silicon cutting waste ; Slurries ; Stabilization ; Turbidity ; Wastes</subject><ispartof>Desalination and water treatment, 2015-10, Vol.56 (2), p.443-451</ispartof><rights>2014 Elsevier Inc.</rights><rights>2014 Balaban Desalination Publications. 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This study investigated centrifugation to recover polyalkylene glycol (PAG) cutting liquid with low turbidity (<100 NTU). The experimental results show that clean PAG liquids could be obtained by using water as a diluent. Because water with high chemical polarity and strong hydrogen bonding would destroy the adsorption of PAG molecules on particles, and weaken the steric stabilization, the particles are aggregated and then separated from liquids by centrifugation. After 50 wt.% water-assisted centrifugation at 3,253 G-force for 24 h, the solid content of the upper liquid decreased to 0.018 g/L, and the turbidity reduced to 7.2 nephelometric turbidity units (NTU). The obtained liquid was then vacuum distillated to remove water. The final recovered PAG with only 0.43 NTU could be reused in the cutting process.</description><subject>Centrifugation</subject><subject>Cutting</subject><subject>Cutting liquid</subject><subject>Distilled water</subject><subject>Glycols</subject><subject>Liquids</subject><subject>Machine tools</subject><subject>Polyalkylene glycol</subject><subject>Recovery</subject><subject>Silicon</subject><subject>Silicon cutting waste</subject><subject>Slurries</subject><subject>Stabilization</subject><subject>Turbidity</subject><subject>Wastes</subject><issn>1944-3986</issn><issn>1944-3994</issn><issn>1944-3986</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><recordid>eNqNkU1LxDAQhosouKz7DzwUvHjp2nw0aS6CLH6BsCB6DmkyXbJmmzVpV_rvbamCeBDnMsPwzDDzvklyjvIlysv8CglKiRB0iXNEl4KwApVHyWxsZ0SU7PhHfZosYtzmQxSUFxTPkvUzaH-A0Ke-Tvfe9cq99Q4aSDeu196ldfC7NFpntW9S3bWtbTbph4otpF0caw1NG2zdbVRrfXOWnNTKRVh85Xnyenf7snrIntb3j6ubp0xTQtqspKWogHFS6YKyQhhhmKCKGs7KihhiNFeccmoEwUARU6w0oq5yQYELXBkyTy6nvfvg3zuIrdzZqME51YDvokSc4UEdjPE_UMyZIESM6MUvdOu70AyPDBQaLmQs5wNFJ0oHH2OAWu6D3anQS5TL0RP57YkcPZGTJ8PY9TQGgy4HC0FGbaHRYGwA3Urj7d8LPgGlJJGX</recordid><startdate>20151009</startdate><enddate>20151009</enddate><creator>Tsai, Tzu-Hsuan</creator><creator>Shih, Yu-Pei</creator><general>Elsevier Inc</general><general>Elsevier Limited</general><scope>6I.</scope><scope>AAFTH</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QH</scope><scope>7QL</scope><scope>7QO</scope><scope>7ST</scope><scope>7T7</scope><scope>7TN</scope><scope>7UA</scope><scope>8FD</scope><scope>C1K</scope><scope>F1W</scope><scope>FR3</scope><scope>H96</scope><scope>H97</scope><scope>KR7</scope><scope>L.G</scope><scope>M7N</scope><scope>P64</scope><scope>SOI</scope></search><sort><creationdate>20151009</creationdate><title>Recovery of polyalkylene glycol from silicon cutting waste using centrifugation</title><author>Tsai, Tzu-Hsuan ; Shih, Yu-Pei</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c433t-8489be673bc54659d9d694a4d768b3d3dc7a7474d932e416a68d9fb094e792bd3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><topic>Centrifugation</topic><topic>Cutting</topic><topic>Cutting liquid</topic><topic>Distilled water</topic><topic>Glycols</topic><topic>Liquids</topic><topic>Machine tools</topic><topic>Polyalkylene glycol</topic><topic>Recovery</topic><topic>Silicon</topic><topic>Silicon cutting waste</topic><topic>Slurries</topic><topic>Stabilization</topic><topic>Turbidity</topic><topic>Wastes</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Tsai, Tzu-Hsuan</creatorcontrib><creatorcontrib>Shih, Yu-Pei</creatorcontrib><collection>ScienceDirect Open Access Titles</collection><collection>Elsevier:ScienceDirect:Open Access</collection><collection>CrossRef</collection><collection>Aqualine</collection><collection>Bacteriology Abstracts (Microbiology B)</collection><collection>Biotechnology Research Abstracts</collection><collection>Environment Abstracts</collection><collection>Industrial and Applied Microbiology Abstracts (Microbiology A)</collection><collection>Oceanic Abstracts</collection><collection>Water Resources Abstracts</collection><collection>Technology Research Database</collection><collection>Environmental Sciences and Pollution Management</collection><collection>ASFA: Aquatic Sciences and Fisheries Abstracts</collection><collection>Engineering Research Database</collection><collection>Aquatic Science & Fisheries Abstracts (ASFA) 2: Ocean Technology, Policy & Non-Living Resources</collection><collection>Aquatic Science & Fisheries Abstracts (ASFA) 3: Aquatic Pollution & Environmental Quality</collection><collection>Civil Engineering Abstracts</collection><collection>Aquatic Science & Fisheries Abstracts (ASFA) Professional</collection><collection>Algology Mycology and Protozoology Abstracts (Microbiology C)</collection><collection>Biotechnology and BioEngineering Abstracts</collection><collection>Environment Abstracts</collection><jtitle>Desalination and water treatment</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Tsai, Tzu-Hsuan</au><au>Shih, Yu-Pei</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Recovery of polyalkylene glycol from silicon cutting waste using centrifugation</atitle><jtitle>Desalination and water treatment</jtitle><date>2015-10-09</date><risdate>2015</risdate><volume>56</volume><issue>2</issue><spage>443</spage><epage>451</epage><pages>443-451</pages><issn>1944-3986</issn><issn>1944-3994</issn><eissn>1944-3986</eissn><abstract>A great amount of slurry waste is formed during the cutting process from silicon ingot to wafers. More than 50% of this waste comes from cutting liquids. This study investigated centrifugation to recover polyalkylene glycol (PAG) cutting liquid with low turbidity (<100 NTU). The experimental results show that clean PAG liquids could be obtained by using water as a diluent. Because water with high chemical polarity and strong hydrogen bonding would destroy the adsorption of PAG molecules on particles, and weaken the steric stabilization, the particles are aggregated and then separated from liquids by centrifugation. After 50 wt.% water-assisted centrifugation at 3,253 G-force for 24 h, the solid content of the upper liquid decreased to 0.018 g/L, and the turbidity reduced to 7.2 nephelometric turbidity units (NTU). The obtained liquid was then vacuum distillated to remove water. 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| fulltext | fulltext |
| identifier | ISSN: 1944-3986 |
| ispartof | Desalination and water treatment, 2015-10, Vol.56 (2), p.443-451 |
| issn | 1944-3986 1944-3994 1944-3986 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_1762080222 |
| source | Alma/SFX Local Collection |
| subjects | Centrifugation Cutting Cutting liquid Distilled water Glycols Liquids Machine tools Polyalkylene glycol Recovery Silicon Silicon cutting waste Slurries Stabilization Turbidity Wastes |
| title | Recovery of polyalkylene glycol from silicon cutting waste using centrifugation |
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