Ultrasmooth and Thermally Stable Silver-Based Thin Films with Subnanometer Roughness by Aluminum Doping

Rough surface and poor stability of ultrathin Ag films limit their applications in nanophotonic and optoelectronic devices. Here, we report an approach for fabricating ultrasmooth and thermally stable Ag-based thin films on SiO2/Si substrates by Al-doping. The effect of Al-doping on the surface morphology and stability of ultrathin Ag films at room temperature and elevated temperature was investigated. The 15 nm Al-doped Ag films with an Al atomic concentration of 4% have a root-mean-square roughness as low as 0.4 nm. The smooth surface morphology is maintained even after 300 °C annealing in N2. Al-doping enhances the nuclei density of films. Moreover, a capping layer spontaneously formed over the Al-doped Ag films restrains the surface diffusion and mass transportation of Ag atoms. Therefore, Al-doping induces ultrathin Ag films with highly stable and ultrasmooth surface morphology.