Low-Resistivity 10 nm Diameter Magnetic Sensors

Resistivities of 5.4 μΩ·cm were measured in 10-nm-diameter metallic wires. Low resistance is important for interconnections of the future to prevent heating, electromigration, high power consumption, and long RC time constants. To demonstrate application of these wires, Co/Cu/Co magnetic sensors wer...

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Veröffentlicht in:Nano letters 2012-08, Vol.12 (8), p.4102-4109
Hauptverfasser: Maqableh, Mazin M, Huang, Xiaobo, Sung, Sang-Yeob, Reddy, K. Sai Madhukar, Norby, Gregory, Victora, R. H, Stadler, Bethanie J. H
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Sprache:eng
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Zusammenfassung:Resistivities of 5.4 μΩ·cm were measured in 10-nm-diameter metallic wires. Low resistance is important for interconnections of the future to prevent heating, electromigration, high power consumption, and long RC time constants. To demonstrate application of these wires, Co/Cu/Co magnetic sensors were synthesized with 20–30 Ω and 19% magnetoresistance. Compared to conventional lithographically produced magnetic tunnel junction sensors, these structures offer facile fabrication and over 2 orders of magnitude lower resistances due to smooth sidewalls from in situ templated chemical growth.
ISSN:1530-6984
1530-6992
DOI:10.1021/nl301610z