Effects of dielectric film surface on oxygen diffusion

The oxygen diffusivity in BaTiO3 thin films heteroepitaxially grown on SrTiO3 substrates was investigated using a gas/solid exchange technique with 18O-isotope-enriched gas. Deformation of the BaTiO3 lattice and inhibition of the oxygen diffusivity occurred simultaneously when the YSZ layer, which i...

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Veröffentlicht in:	Journal of the Ceramic Society of Japan 2014/06/01, Vol.122(1426), pp.410-414
Hauptverfasser:	SUZUKI, Jumpei, MATSUMOTO, Kenji, RYU, Minoru, IWAZAKI, Yoshiki, SUZUKI, Toshimasa, WATANABE, Ken, HASHIGUCHI, Minako, SAKAGUCHI, Isao, OHASHI, Naoki
Format:	Artikel
Sprache:	eng
Schlagworte:	Barium titanate Barium titanates Ceramics Deformation Deposition Diffusion Diffusivity Dislocation Lattice constant Oxygen diffusion Oxygen vacancy Residual stress Secondary ion mass spectrometry Thin films Yttria stabilized zirconia
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Beschreibung
Zusammenfassung:	The oxygen diffusivity in BaTiO3 thin films heteroepitaxially grown on SrTiO3 substrates was investigated using a gas/solid exchange technique with 18O-isotope-enriched gas. Deformation of the BaTiO3 lattice and inhibition of the oxygen diffusivity occurred simultaneously when the YSZ layer, which is assumed to be catalytic for the 18O/16O exchange reaction, was deposited on BaTiO3. The mechanism for the reduction in oxygen diffusivity due to the YSZ cover layer is discussed in terms of residual stress in the strained BaTiO3 layer.
ISSN:	1882-0743 1348-6535
DOI:	10.2109/jcersj2.122.410