Enhancing electrical conductivity and electrical thermal characteristics of a PEDOT:PSS thin layer by using solvent treatment and adding Ag nanoparticle solution

•A heating element of MEMS using PEDOT:PSS (conductive polymer) was investigated.•Our method used solvent treatment and adding Ag nanoparticle solution to PEDOT:PSS.•Conductive layers (t1–3μm) could raise temperature by 20–50°C by applying 3–5V.•Temperature characteristics were also examined by electrical current images by AFM. A method of enhancing the electrical conductivity of 3,4-ethylenedioxythiophene:poly styrene sulfonate (PEDOT:PSS) by combining solvent treatment (adding high polar solvent: 5wt% ethylene glycol) and adding a small amount of silver (Ag) nanoparticles in a solution was investigated. The main purpose of this was to apply a PEDOT:PSS conductive layer to micro-thermal devices driven by electricity and, for this, to reduce the layer thickness (for low stiffness) while maintaining necessary high electrical conductivity. Layers with thicknesses of less than about 10μm were examined for electrical conductivity and temperature when electricity was applied. The solvent treated PEDOT:PSS had suitable electrical resistance to generate appropriate temperature properties. The added Ag nanoparticles reduced the electrical resistance by 30–70% over the measured thickness range. The electric conductivity applied with this method was 200–260Ω−1cm−1 for thicknesses of 1–2μm (conductive area: 12mm×10mm) and the generated temperature increase was 20–50°C at applied voltages of 3–5V. These characteristics are considered to be suitable to use the conductive layer as a heating element. In addition, the method we used scarcely degraded the transparency of the layer. Measurements of the conductive area in a layer with conductive atomic force microscope (AFM) indicated that the added Ag nanoparticles contributed to increasing the conductive areas and distributing them more uniformly.