Bis(diaryliodonium) perfluorosulfonimide zwitterions as potential photo acid generators

Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations. Bis(diaryliodonium) perfluorosulfonimide zwitterions. Three examples of bis(diaryliodonium)...

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Veröffentlicht in:	Journal of fluorine chemistry 2014-04, Vol.160, p.12-15
Hauptverfasser:	Mei, Hua, DesMarteau, Darryl D.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acid diffusion Amplification Fluorine Formulations Generators Iodonium Photo-acid generators Photoresists Zwitterions
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations. Bis(diaryliodonium) perfluorosulfonimide zwitterions. Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations.
ISSN:	0022-1139 1873-3328
DOI:	10.1016/j.jfluchem.2014.01.004