Partially fluorinated oxo-alkoxide tungsten(vi) complexes as precursors for deposition of WO sub(x) nanomaterials

The partially fluorinated oxo-alkoxide tungsten(vi) complexes WO(OR) sub(4) [4; R = C(CH sub(3)) sub(2)CF sub(3 ), 5; R = C(CH sub(3))(CF sub(3)) sub(2)] have been synthesized as precursors for chemical vapour deposition (CVD) of WO sub(x) nanocrystalline material. Complexes 4 and 5 were prepared by salt metathesis between sodium salts of the fluoroalkoxides and WOCl sub(4). Crystallographic structure analysis allows comparison of the bonding in 4 and 5 as the fluorine content of the fluoroalkoxide ligands is varied. Screening of 5 as a CVD precursor by mass spectrometry and thermogravimetric analysis was followed by deposition of WO sub(x) nanorods.