Microstructure, Oxidation and Tribological Properties of TiAlCN/VCN Coatings Deposited by Reactive HIPIMS

Microstructure, Oxidation and Tribological Properties of TiAlCN/VCN Coatings Deposited by Reactive HIPIMS

2.5 μm thick TiAlCN/VCN coatings were deposited by reactive HIPIMS process. XTEM showed gradual evolution of the structure of the coating with thickness. The initial structure is nanoscale multilayer with sharp interlayer interfaces. This transforms to nanocomposite of TiAlCN and VCN nanocrystalline...

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Veröffentlicht in:IOP conference series. Materials Science and Engineering 2012-09, Vol.39 (1), p.12011-5
Hauptverfasser: Hovsepian, P Eh, Kamath, G, Ehiasarian, A P, Haasch, R, Petrov, I
Format: Artikel
Sprache:eng
Schlagworte:
Carbon
Coatings
Deposition
Evolution
Interlayers
Mass spectrometry
Materials science
Mechanical properties
Multilayers
Nanocomposites
Nanostructure
Oxidation
Phase transformations
Thickness
Tribology
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Zusammenfassung:2.5 μm thick TiAlCN/VCN coatings were deposited by reactive HIPIMS process. XTEM showed gradual evolution of the structure of the coating with thickness. The initial structure is nanoscale multilayer with sharp interlayer interfaces. This transforms to nanocomposite of TiAlCN and VCN nanocrystalline grains surrounded by C-rich tissue phase and finally changes to an amorphous carbon rich Me-C phase. Energy-resolved mass spectrometry revealed that HIPIMS plasma is a factor of 10 richer in C1+ ions, and therefore more reactive, as compared to the plasma generated by standard magnetron discharge at the same conditions. The peculiar structure evolution in HIPIMS is is attributed to target poisoning effect.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/39/1/012011