Measurements of SiO sub(2) glass surface parameters by methods of microscopy
In this research we compare chemical and plasma treatment methods for surface of SiO sub(2) glass. For chemical treatment of surface tequila and alcohol were used but for plasma treatment - Ar+As and Ar+Se plasmas. Surface topography was analyzed using atomic force microscope. Comparison of chemical...
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Veröffentlicht in: | IOP conference series. Materials Science and Engineering 2012-01, Vol.38, p.1-4 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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