Measurements of SiO sub(2) glass surface parameters by methods of microscopy

Measurements of SiO sub(2) glass surface parameters by methods of microscopy

In this research we compare chemical and plasma treatment methods for surface of SiO sub(2) glass. For chemical treatment of surface tequila and alcohol were used but for plasma treatment - Ar+As and Ar+Se plasmas. Surface topography was analyzed using atomic force microscope. Comparison of chemical...

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Veröffentlicht in:IOP conference series. Materials Science and Engineering 2012-01, Vol.38, p.1-4
Hauptverfasser: Gavars, Eduards, Svagere, Anda, Skudra, Atis, Zorina, Natalia, Poplausks, Raimonds
Format: Artikel
Sprache:eng
Schlagworte:
Alcohols
Atomic force microscopes
Chemical composition
Glass
Materials science
Microscopy
Silicon dioxide
Topography
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Zusammenfassung:In this research we compare chemical and plasma treatment methods for surface of SiO sub(2) glass. For chemical treatment of surface tequila and alcohol were used but for plasma treatment - Ar+As and Ar+Se plasmas. Surface topography was analyzed using atomic force microscope. Comparison of chemical and plasma treatment methods shows that surface treated with plasma is smoother. Because of their various chemical compositions tequila and alcohol show different results.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/38/1/012043