Laser polishing and laser form correction of fused silica optics
With laser polishing, the roughness of ground glass surfaces can be significantly reduced. With process speeds up to 1 cm2/s independent of the processed surface shape, the resulting roughness is already sufficient for illumination optics. To further reduce the roughness, the polishing process itsel...
Gespeichert in:
Veröffentlicht in: | Materialwissenschaft und Werkstofftechnik 2015-07, Vol.46 (7), p.668-674 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | With laser polishing, the roughness of ground glass surfaces can be significantly reduced. With process speeds up to 1 cm2/s independent of the processed surface shape, the resulting roughness is already sufficient for illumination optics. To further reduce the roughness, the polishing process itself will be optimized and moreover combined with a subsequent laser based form correction. Within this paper, results of laser polishing as well as laser form correction and combination of the two processes are presented and discussed. |
---|---|
ISSN: | 0933-5137 1521-4052 |
DOI: | 10.1002/mawe.201500319 |