P-158L: Late-News Poster: Development of A Silicon Process with Device Mobility >500 Cm super(2)/V-Sec Suitable for a Large-Area Display Backplane Using Embedded Single-Crystal Silicon Particles

P-158L: Late-News Poster: Development of A Silicon Process with Device Mobility >500 Cm super(2)/V-Sec Suitable for a Large-Area Display Backplane Using Embedded Single-Crystal Silicon Particles

We report device mobility >500 cm2/V.s in a scalable process suitable for electronic backplanes for large area OLED displays. Ceramic substrates as large as 44 inches were fabricated utilizing planarized regions of Single Crystal Silicon (SCS).

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Veröffentlicht in:SID International Symposium Digest of technical papers 2015-06, Vol.46 (1), p.1334-1336
Hauptverfasser: Chen, Feng, Tarighat, Roohollah Samadzadeh, Hill, Graham, Vieth, John, Sivoththaman, Siva, Dykaar, Douglas R
Format: Artikel
Sprache:eng
Schlagworte:
Backplanes
Ceramics
Devices
Electronics
Silicon
Silicon substrates
Single crystals
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Zusammenfassung:We report device mobility >500 cm2/V.s in a scalable process suitable for electronic backplanes for large area OLED displays. Ceramic substrates as large as 44 inches were fabricated utilizing planarized regions of Single Crystal Silicon (SCS).
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.10113