Ion-plasma modules for application of nanostructured carbon coatings

The basics of forming technology of nanostructured films in the form of composites containing hydrogenated carbon and metal parts was considered. Provides information about the methods used to generate these coatings. A description of the vacuum system provides the most satisfying modern requirements to technological equipment were given: minimum weight and size, power consumption, high stability and environmental safety of the process, tolerance to automate the process.