Synthesis and characterization of InGaAs nanowires grown by MOCVD
Semiconductor nanowires have been intensively investigated in order to study their unique fundamental and application properties that develop at the nano-scale. One of main problems in the growth of III-V semiconductor nanowire is uniformity both of in dimension and composition of chemical elements....
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Veröffentlicht in: | Journal of physics. Conference series 2013-01, Vol.423 (1), p.12047-5 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Semiconductor nanowires have been intensively investigated in order to study their unique fundamental and application properties that develop at the nano-scale. One of main problems in the growth of III-V semiconductor nanowire is uniformity both of in dimension and composition of chemical elements. We synthesized InGaAs nanowire on GaAs (111) substrate at 400 °C – 480 °C temperatures for 30 minutes using MOCVD. The nanowires grow perpendicular to the substrate via direct impinging mechanism and they have hexagonal shape with diameter of 80-150 nm. Dimension of nanowire, length and diameter, increase with increases of growth temperature. Formations of tapering could be controlled with growth at lower temperature. |
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ISSN: | 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/423/1/012047 |