Microstructure replication using high frequency vibroactive pad

The paper is dedicated to analysis, practical exploitation of vibroactive pad, whose fundament is multilayer actuator in experiments of mechanical hot imprint. The goal is to compare the quality of microstructures, created by using single layer vibroactive pad and vibroactive pad, based on multilayer actuator. Numerical modelling and experimental analysis is performed in order to find resonant modes of multilayer vibroactive pad. Having operating frequencies, vibroactive pads are applied in mechanical hot imprint process. Microstructures are created on the surface of polycarbonate, the only process variable is type of vibroactive pad. Three types of microstructure quality measurements are performed: measurement of diffraction efficiency, optical microscopy and atomic force microscopy, in order to examine quality of replica.