Synthesis and characterization of Ba0.7Sr0.3TiO3, BaZr0.3Ti0.7O3 thin film heterostructures

The paper presents synthesis of Ba 0.7 Sr 0.3 TiO 3 (BST), Ba 0.7 Sr 0.3 TiO 3 (BZT) thin films and BZT/BST heterostructures using modified Pechini method. The La 0.7 Sr 0.3 MnO 3 has been used as a conducting bottom layer to form metal ferroelectric metal capacitor. The thin films are spin coated on SiO 2 /n-Si (100) substrates. The thin films thus deposited are characterized for crystal structure, morphology, dielectric and complex impedance properties. The results show that BZT/BST heterostructures show reduced loss tangent tan δ and useful value of figure of merit γ in RF range of frequencies. The results on dielectric properties could be analyzed in terms of the Maxwell–Wagner Model and contribution due to superlattice effects.