Vertical ZnO nanorod array as an effective hydrogen gas sensor

Vertical ZnO nanorod array as an effective hydrogen gas sensor

We report a vertical ZnO nanorod array as a highly sensitive hydrogen gas sensor. The vertical ZnO nanorod array on an Nb/Si substrate was fabricated using an anodized aluminum oxide nanotemplate and an atomic layer deposition method. The vertical ZnO nanorod array hydrogen gas sensor exhibited a hi...

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Veröffentlicht in:Ceramics international 2013-01, Vol.39 (1), p.887-890
Hauptverfasser: Lim, Y.T., Son, J.Y., Rhee, J.-S.
Format: Artikel
Sprache:eng
Schlagworte:
Aluminum oxide
Arrays
Deposition
Gas sensor
Gas sensors
Nanocomposites
Nanomaterials
Nanostructure
Semiconductor
Vertical nanorod array
Zinc oxide
ZnO atomic layer deposition
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Zusammenfassung:We report a vertical ZnO nanorod array as a highly sensitive hydrogen gas sensor. The vertical ZnO nanorod array on an Nb/Si substrate was fabricated using an anodized aluminum oxide nanotemplate and an atomic layer deposition method. The vertical ZnO nanorod array hydrogen gas sensor exhibited a high sensitivity for hydrogen in a wide concentration range.
ISSN:0272-8842
1873-3956
DOI:10.1016/j.ceramint.2012.06.035