Deposition of NbN thin films onto high-speed steel using reactive magnetron sputtering for corrosion protective applications

Hard niobium nitride films were deposited onto high-speed steel (HSS) using reactive magnetron sputtering. Experiments were carried out by varying the nitrogen partial pressure. The porosity and corrosion behavior of the NbNx/HSS samples were studied by a copper decoration test and by potentiodynami...

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Veröffentlicht in:Surface & coatings technology 2003-01, Vol.163-164, p.169-175
Hauptverfasser: Fenker, M, Balzer, M, Büchi, R.V, Jehn, H.A, Kappl, H, Lee, J.-J
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Sprache:eng
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Zusammenfassung:Hard niobium nitride films were deposited onto high-speed steel (HSS) using reactive magnetron sputtering. Experiments were carried out by varying the nitrogen partial pressure. The porosity and corrosion behavior of the NbNx/HSS samples were studied by a copper decoration test and by potentiodynamic corrosion tests in 0.8 M NaCl solution (pH 7), respectively. The corrosion tests revealed that the NbN/HSS system has a very broad passivation range with a low current density. Further film properties were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD), scratch testing and microhardness measurements. Good adhesion and very high plastic universal-hardness values in the range of 34000–53000 N/mm2 were found for the NbN thin films.
ISSN:0257-8972
1879-3347
DOI:10.1016/S0257-8972(02)00601-1