Deposition of NbN thin films onto high-speed steel using reactive magnetron sputtering for corrosion protective applications
Hard niobium nitride films were deposited onto high-speed steel (HSS) using reactive magnetron sputtering. Experiments were carried out by varying the nitrogen partial pressure. The porosity and corrosion behavior of the NbNx/HSS samples were studied by a copper decoration test and by potentiodynami...
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Veröffentlicht in: | Surface & coatings technology 2003-01, Vol.163-164, p.169-175 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Hard niobium nitride films were deposited onto high-speed steel (HSS) using reactive magnetron sputtering. Experiments were carried out by varying the nitrogen partial pressure. The porosity and corrosion behavior of the NbNx/HSS samples were studied by a copper decoration test and by potentiodynamic corrosion tests in 0.8 M NaCl solution (pH 7), respectively. The corrosion tests revealed that the NbN/HSS system has a very broad passivation range with a low current density. Further film properties were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD), scratch testing and microhardness measurements. Good adhesion and very high plastic universal-hardness values in the range of 34000–53000 N/mm2 were found for the NbN thin films. |
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ISSN: | 0257-8972 1879-3347 |
DOI: | 10.1016/S0257-8972(02)00601-1 |