Electrolytic Tilt Sensor with Domed Cap for Improved Performance

In recent years, some efforts have been made in our laboratory to improve the performance of previously reported electrolyte-based tilt sensors. Even though the previously reported electrolytic tilt sensors have merits of low cost and a simple fabrication process, they show several undesirable perfo...

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Veröffentlicht in:Japanese Journal of Applied Physics 2013-06, Vol.52 (6), p.06GL13-06GL13-4
Hauptverfasser: Choi, Ju Chan, Choi, Young Chan, Lee, June Kyoo, Kong, Seong Ho
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Sprache:eng
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Zusammenfassung:In recent years, some efforts have been made in our laboratory to improve the performance of previously reported electrolyte-based tilt sensors. Even though the previously reported electrolytic tilt sensors have merits of low cost and a simple fabrication process, they show several undesirable performances such as inconsistent response time and slow reversion when it returns to the initial position (inclination angle of 0°) from an arbitrary tilted position. The irregular performances are caused by the flat upper cover. In this paper, we report the design and fabrication of an electrolytic tilt sensor with a domed cap for improving the response time and instant reversion. For a fast and regular reversion, the cavities on the cap substrate have been designed to be a domed shape. The measured reversion time with the proposed tilt sensor from 10° to the initial state was approximately 0.3 s, which is more than 6 times faster than the previously reported one.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.52.06GL13