Fabrication of Transparent CuCrO sub(2):Mg/ZnO p-n Junctions Prepared by Magnetron Sputtering on an Indium Tin Oxide Glass Substrate

Transparent p-n junctions composed of zinc oxide and magnesium-doped copper-chromium oxide thin films were prepared using radio-frequency (RF) magnetron sputtering deposition on indium-tin oxide glass substrates. The temperature of the substrate during deposition was varied to examine differences in...

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Veröffentlicht in:Japanese Journal of Applied Physics 2013-05, Vol.52 (5S2)
Hauptverfasser: Chen, Li-Fong, Wang, Yung-Po, Chiu, Te-Wei, Shih, Wen-Ching, Wu, Mu-Shiang
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Chiu, Te-Wei
Shih, Wen-Ching
Wu, Mu-Shiang
description Transparent p-n junctions composed of zinc oxide and magnesium-doped copper-chromium oxide thin films were prepared using radio-frequency (RF) magnetron sputtering deposition on indium-tin oxide glass substrates. The temperature of the substrate during deposition was varied to examine differences in the diode characteristics of the current-voltage response effect. The crystalline structure of the diode films was verified using X-ray diffraction (XRD) analysis. The ratio of the forward current to the reverse current reached 85.9 in the range of +4 to -4 V at a deposition temperature of 450 [degrees]C. The p-n junction diode film had an optical transparency above 75% for wavelengths in the visible range.
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects DEPOSITION
DIODES
FABRICATION
Glass
GLASSES
Indium-Tin
Magnetron sputtering
OXIDES
P-n junctions
SPUTTERING
THIN FILMS
ZINC OXIDE
title Fabrication of Transparent CuCrO sub(2):Mg/ZnO p-n Junctions Prepared by Magnetron Sputtering on an Indium Tin Oxide Glass Substrate
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