Compression plasma flows modification of surface layers in the system “Ti–Si”: Phase composition, structure and element redistribution

Compression plasma flows modification of surface layers in the system “Ti–Si”: Phase composition, structure and element redistribution

In the present study Ti5Si3/Si layers synthesized by compression plasma flows treatment (treatment time ~100μs) of the system “titanium coating (1μm) – silicon substrate” are studied. XRD, SEM and LAES were employed to characterize the phase composition, structure and elemental distribution of these...

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Veröffentlicht in:Surface & coatings technology 2013-11, Vol.235, p.685-690
Hauptverfasser: Uglov, V.V., Kvasov, N.T., Kudaktsin, R.S., Petukhou, Yu.A., Ermalitskaya, K.F., Astashynski, V.M., Kuzmitski, A.M.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Coatings
Compressing
Compression plasma flows
Convection
Corrosion
Corrosion prevention
Cross-disciplinary physics: materials science
rheology
Diffusion
Diffusion layers
Eutectics
Exact sciences and technology
Materials science
Metals. Metallurgy
Phase composition
Physics
Protective coatings
Silicon
Silicon substrates
Surface treatments
Titanium
Titanium silicide
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Zusammenfassung:In the present study Ti5Si3/Si layers synthesized by compression plasma flows treatment (treatment time ~100μs) of the system “titanium coating (1μm) – silicon substrate” are studied. XRD, SEM and LAES were employed to characterize the phase composition, structure and elemental distribution of these layers. It has been found that plasma energy density (Q) dominates peculiarities of layer structure and elemental distribution. For Q
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2013.08.047