Thermocapillary Actuation of Millimeter-Scale Rotary Structures

In this paper, we describe the rotary motion, by Marangoni flow, of a millimeter-scale rotary structure immersed in a thin layer of liquid. A 16 × 8 array of 1 × 0.8 × 0.3 mm 3 surface-mount resistors is suspended ≈ 500 μm above the liquid to serve as a programmable heat source. The continuous opera...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of microelectromechanical systems 2014-04, Vol.23 (2), p.494-499
Hauptverfasser: Hendarto, Erwin, Gianchandani, Yogesh B.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:In this paper, we describe the rotary motion, by Marangoni flow, of a millimeter-scale rotary structure immersed in a thin layer of liquid. A 16 × 8 array of 1 × 0.8 × 0.3 mm 3 surface-mount resistors is suspended ≈ 500 μm above the liquid to serve as a programmable heat source. The continuous operation of resistor elements is used to impose a spatially-defined temperature gradient on the surface of the liquid. With a maximum temperature gradient of 36.6 K/mm at the surface of a 2 mm-thick film of liquid with viscosity 5 cSt, a stainless steel rotary structure with a weight of ≈ 10 mg, a diameter of 4.1 mm, and blade angle of 34° takes 28 s to make a 360° rotation. In general, the angular velocity of the rotary structure is affected by the temperature gradient of the liquid surface and liquid viscosity among several factors.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2013.2281328