Balanced plane-mirror heterodyne interferometer with subnanometer periodic nonlinearity

Balanced plane-mirror heterodyne interferometer with subnanometer periodic nonlinearity

A balanced plane-mirror heterodyne interferometer with a polarizing beam splitter used to recombine the reference and measurement beams is proposed to reduce periodic nonlinearity and to eliminate thermal error. Experimental results indicated that the periodic error due to ghost reflection was kept...

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Veröffentlicht in:Applied optics (2004) 2014-08, Vol.53 (24), p.5448-5452
Hauptverfasser: Hu, Peng-cheng, Chen, Peng, Ding, Xue-mei, Tan, Jiu-bin
Format: Artikel
Sprache:eng
Schlagworte:
Balancing
Beam splitters
Beams (radiation)
Error analysis
Errors
Ghosts
Interferometers
Nonlinearity
Reflection
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Zusammenfassung:A balanced plane-mirror heterodyne interferometer with a polarizing beam splitter used to recombine the reference and measurement beams is proposed to reduce periodic nonlinearity and to eliminate thermal error. Experimental results indicated that the periodic error due to ghost reflection was kept within ±36  pm, and the interferometer proposed was immune from thermal error.
ISSN:1559-128X
2155-3165
1539-4522
DOI:10.1364/AO.53.005448