Investigation of the Gate Bias Stress Instability in ZnO Thin Film Transistors by Low-Frequency Noise Analysis
To investigate the electrical instability mechanism under the application of gate bias stress and relaxation, the $1/f$ noise spectra of two different ZnO thin-film transistors (TFTs) were analyzed. In terms of gate bias dependence ($S_{\text{IDS}}/I_{\text{DS}}$), both devices followed a mobility f...
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Veröffentlicht in: | Japanese Journal of Applied Physics 2013-04, Vol.52 (4), p.04CF04-04CF04-5 |
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Sprache: | eng |
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Zusammenfassung: | To investigate the electrical instability mechanism under the application of gate bias stress and relaxation, the $1/f$ noise spectra of two different ZnO thin-film transistors (TFTs) were analyzed. In terms of gate bias dependence ($S_{\text{IDS}}/I_{\text{DS}}$), both devices followed a mobility fluctuation model based on the traps in their channel layers prior to and after stress. Device A (channel thickness: 20 nm), recovered its initial noise parameter ($\alpha_{\text{app}}$) after relaxation, in exact agreement with the current--voltage ($I$--$V$) measurement results; this shows that in device A, the dominant phenomenon under the application of stress was temporary charge trapping at grain boundary traps. However, in device B (channel thickness: 80 nm), $\alpha_{\text{app}}$ did not recover its initial values after relaxation, and transfer parameters, such as $V_{\text{TH}}$, mobility, SS, and $N_{\text{t}}$, degraded after the gate bias stress. Moreover, after the stress, device B showed a reduced gate insulator breakdown voltage. The electrical degradation seen in device B can be explained by trap creation and/or charge injection near channel/gate oxide interfaces, including those within the channel layer. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.7567/JJAP.52.04CF04 |