Homogeneous Al sub(2)O sub(3) Multilayered Films Deposited on Poly(ethylene terephthalate) by Facing-Target Sputtering System for Thin-Film Passivation of Organic Light-Emitting Diodes

Homogeneous Al sub(2)O sub(3) Multilayered Films Deposited on Poly(ethylene terephthalate) by Facing-Target Sputtering System for Thin-Film Passivation of Organic Light-Emitting Diodes

Homogeneous multilayered barrier films were fabricated by means of reactive and nonreactive processes using Al sub(2)O sub(3) with the facing-target sputtering (FTS) system. The multilayered films showed 60% improved barrier performance and their fabrication was 30% faster than that of single Al sub...

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Veröffentlicht in:Japanese Journal of Applied Physics 2013-01, Vol.52 (12R), p.126201-1-126201-5
Hauptverfasser: Kim, Hwa-Min, Bae, Kang, Seo, Sung-Bo, Sohn, Sunyoung, Kim, Dongyoung
Format: Artikel
Sprache:eng
Schlagworte:
Aluminum oxide
Barriers
Deposition
Organic light-emitting diodes
Passivation
Performance enhancement
Sputtering
Terephthalate
Thin films
Water vapor
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Zusammenfassung:Homogeneous multilayered barrier films were fabricated by means of reactive and nonreactive processes using Al sub(2)O sub(3) with the facing-target sputtering (FTS) system. The multilayered films showed 60% improved barrier performance and their fabrication was 30% faster than that of single Al sub(2)O sub(3) layers of the same thickness. The water vapor transmission rate was increased up to the order of 10 super(-4) g[middot]m super(-2)[middot]d super(-1) from a three-pair system of reactive and nonreactive sputtered Al sub(2)O sub(3) bilayers.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.52.126201