Hardness and Wear Resistance of Ti-B-C-N Nanocomposite Coatings Synthesized by Multi-Target Magnetron Co-Sputtering

Ti-B-C-N nanocomposite coatings were synthesized on Si(100) and stainless steel substrate by Multi-target Magnetron Co-sputtering. X-ray diffractometry (XRD) and X-ray photoelectron spectroscopy (XPS) were employed to measure the structure and chemical states of the coatings. The measurements of nanoindenter and multi-functional tester indicated that the maximum hardness and elastic modulus were 42.8 GPa and 424 GPa when the work pressure was 0.5 Pa, the powers of Ti target and B4C were 60 and 150 W, the flows of N2 and Ar were 4 and 36 sccm, and the substrate bias was -100 V.