Micromechanics Based on Silicon Carbide
This paper describes using of silicon carbide for micromechanical systems. Low stressed sensitive membrane signal converters, thin film transducers and piezoresistive sensors were formed based on silicon carbide films. The mechanical properties of silicon carbide films were determined.
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| Veröffentlicht in: | Materials science forum 2013-01, Vol.740-742, p.998-1001 |
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| creator | Luchinin, Victor V. Astashenkova, Olga N. Korlyakov, Andrej V. |
| description | This paper describes using of silicon carbide for micromechanical systems. Low stressed sensitive membrane signal converters, thin film transducers and piezoresistive sensors were formed based on silicon carbide films. The mechanical properties of silicon carbide films were determined. |
| doi_str_mv | 10.4028/www.scientific.net/MSF.740-742.998 |
| format | Article |
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| identifier | ISSN: 0255-5476 |
| ispartof | Materials science forum, 2013-01, Vol.740-742, p.998-1001 |
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| language | eng |
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| source | Scientific.net Journals |
| subjects | Converters Materials science Mechanical properties Micromechanics Sensors Silicon carbide Thin films Transducers |
| title | Micromechanics Based on Silicon Carbide |
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