Micromechanics Based on Silicon Carbide

Micromechanics Based on Silicon Carbide

This paper describes using of silicon carbide for micromechanical systems. Low stressed sensitive membrane signal converters, thin film transducers and piezoresistive sensors were formed based on silicon carbide films. The mechanical properties of silicon carbide films were determined.

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Veröffentlicht in:Materials science forum 2013-01, Vol.740-742, p.998-1001
Hauptverfasser: Luchinin, Victor V., Astashenkova, Olga N., Korlyakov, Andrej V.
Format: Artikel
Sprache:eng
Schlagworte:
Converters
Materials science
Mechanical properties
Micromechanics
Sensors
Silicon carbide
Thin films
Transducers
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Zusammenfassung:This paper describes using of silicon carbide for micromechanical systems. Low stressed sensitive membrane signal converters, thin film transducers and piezoresistive sensors were formed based on silicon carbide films. The mechanical properties of silicon carbide films were determined.
ISSN:0255-5476
1662-9752
1662-9752
DOI:10.4028/www.scientific.net/MSF.740-742.998