Design of an Array Bionic Vector Vibration Sensor Based on MEMS

In the process of a physical procedure, more than one vibration signals should be measured, whose value and frequency are in a wide range. Therefore, in such a situation, a single sensor can hardly meet the testing requirement. To solve this kind of problems, a kind of aligned array MEMS bionic vector vibration sensor is proposed. This aligned array vibration sensor consists of four micro-structure sensors and the testing ranges are 10g, 100g, 500g, and 1000g. On the basis of the mathematical model, the array sensing unit was simulated by ANSYS. The test was presented at last. The experiment results show that both the two direction of the aligned array vibration sensor have high sensitivity, good linearity and good output stability. The sensitivity of the X direction is 2.6134mv/g and Y is 2.5563mv/g, the linearity of X direction is 0.99991and Y is 0.99968.