Arrangement of GaN nanowires grown by plasma-assisted molecular beam epitaxy on silicon substrates with amorphous Al sub(2)O sub(3) buffers
We report on catalyst-free growth of GaN nanowires (NWs) by plasma-assisted molecular beam epitaxy on Si(111) substrates with a thin amorphous Al sub(2)O sub(3) buffer layers deposited at low temperature by atomic layer deposition. We show that nanowires obtained are homogenously distributed and wel...
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Veröffentlicht in: | Journal of crystal growth 2014-09, Vol.401, p.665-669 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We report on catalyst-free growth of GaN nanowires (NWs) by plasma-assisted molecular beam epitaxy on Si(111) substrates with a thin amorphous Al sub(2)O sub(3) buffer layers deposited at low temperature by atomic layer deposition. We show that nanowires obtained are homogenously distributed and well aligned with the c-axis perpendicular to the substrate in a similar way as their counterparts grown without the Al sub(2)O sub(3) buffer. However, NWs are twisted nearly randomly and do not show any in-plane alignment with the substrate even for the thinnest (~2 nm) buffer used, which is quite opposite to the behavior observed for NWs grown on a bare silicon. |
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ISSN: | 0022-0248 |
DOI: | 10.1016/j.jcrysgro.2013.11.056 |