Research for Extraction Method of MEMS Devices Macro-Model

The purpose of extracting Macro-model of macro sensor is to find out the mathematical model representing system characteristics of behavior efficiently and accurately. A good understanding of the whole system, collaborative simulation with circuit and optimize system design are meaningful. Whether t...

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Veröffentlicht in:	Key engineering materials 2012-12, Vol.531-532, p.555-558
Hauptverfasser:	Zhang, Huan, Chen, Chao, Ma, Shu Min, Zhou, Hong Xi, Deng, Ya Nan, Wang, Tao
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer simulation Devices Extraction Mathematical analysis Mathematical models Microelectromechanical systems Sensors Systems design
Online-Zugang:	Volltext
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