Research for Extraction Method of MEMS Devices Macro-Model

The purpose of extracting Macro-model of macro sensor is to find out the mathematical model representing system characteristics of behavior efficiently and accurately. A good understanding of the whole system, collaborative simulation with circuit and optimize system design are meaningful. Whether the extraction of device level Macro- model is truly effective or not, it directly influences the simulation results of system level. Therefore, an effective extraction method of Macro-model is crucial to system simulation. Meanwhile, fast and effective extraction approach for MEMS devices Macro-model will continue to be the main future development of technology. This paper presents a fast automatic extraction technology for Macro-model. Coordinating physical level and system level is to meet the demands of system level fast modeling and simulation.