Research for Extraction Method of MEMS Devices Macro-Model
The purpose of extracting Macro-model of macro sensor is to find out the mathematical model representing system characteristics of behavior efficiently and accurately. A good understanding of the whole system, collaborative simulation with circuit and optimize system design are meaningful. Whether t...
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| Veröffentlicht in: | Key engineering materials 2012-12, Vol.531-532, p.555-558 |
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| container_title | Key engineering materials |
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| creator | Zhang, Huan Chen, Chao Ma, Shu Min Zhou, Hong Xi Deng, Ya Nan Wang, Tao |
| description | The purpose of extracting Macro-model of macro sensor is to find out the mathematical model representing system characteristics of behavior efficiently and accurately. A good understanding of the whole system, collaborative simulation with circuit and optimize system design are meaningful. Whether the extraction of device level Macro- model is truly effective or not, it directly influences the simulation results of system level. Therefore, an effective extraction method of Macro-model is crucial to system simulation. Meanwhile, fast and effective extraction approach for MEMS devices Macro-model will continue to be the main future development of technology. This paper presents a fast automatic extraction technology for Macro-model. Coordinating physical level and system level is to meet the demands of system level fast modeling and simulation. |
| doi_str_mv | 10.4028/www.scientific.net/KEM.531-532.555 |
| format | Article |
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| subjects | Computer simulation Devices Extraction Mathematical analysis Mathematical models Microelectromechanical systems Sensors Systems design |
| title | Research for Extraction Method of MEMS Devices Macro-Model |
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